論文

査読有り
2014年

Ultrathin Chemical Vapor Deposition (CVD)-Grown Hexagonal Boron Nitride as a High-Quality Dielectric for Tunneling Devices on Rigid and Flexible Substrates

Journal of Physical Chemistry C
  • Orofeo, Carlo M.
  • ,
  • Suzuki, Satoru
  • ,
  • Hibino, Hiroki

118
6
開始ページ
3340
終了ページ
3346
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1021/jp410874z
出版者・発行元
AMER CHEMICAL SOC

We investigate the tunneling properties of large-area monolayer hexagonal boron nitride (BN) grown via chemical vapor deposition (CVD) by fabricating metal/BN/metal devices on rigid and flexible substrates and compare the properties to metal/exfoliated BN/graphite devices. The measured current of the tunneling devices sandwiched by metal electrodes is linear around zero bias and increases exponentially at higher biases, a behavior consistent with direct tunneling. We also investigate the effect of PMMA contamination on the tunneling current by comparing the zero-bias resistances of the BN devices that have undergone PMMA cleaning by acetone and by heat treatment. Annealing under Ar/O-2 at 500 degrees C proves to be the best heat treatment for removing the PM.MA contaminants introduced during BN transfer, though extra care must be given because this condition can also roughen the bottom electrodes. Further, from tunneling theory, we estimate the barrier height for tunneling to be similar to 2.5 eV, and the dielectric strength to be 3.78 +/- 0.83 GV m(-1) which are comparable to those of exfoliated monolayer BN. Our results demonstrate that CVD-grown BN can be a perfect alternative to exfoliated BN for tunneling applications, such as vertical transistors and spintronics, with an advantage of being available in a large area.

リンク情報
DOI
https://doi.org/10.1021/jp410874z
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000331493400053&DestApp=WOS_CPL
ID情報
  • DOI : 10.1021/jp410874z
  • ISSN : 1932-7447
  • ORCIDのPut Code : 23397103
  • Web of Science ID : WOS:000331493400053

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