X-ray-radiolysis-induced photochemical reaction of a liquid solution enables the direct synthesis and immobilization of nano/micro-scale particles and their aggregates onto a desired area. As is well known, the synthesis, growth and aggregation are dependent on the pH, additives and X-ray irradiation conditions. In this study, it was found that the topography and composition of synthesized particles are also dependent on the types of substrate dipped in an aqueous solution of Cu(COOCH3)(2) in the X-ray-radiolysis-induced photochemical reaction. These results are attributed to the fact that a secondary electron induced by the X-ray irradiation, surface or interface on which the particles are nucleated and grown influences the particle shape and composition. This study will shed light on understanding a novel photochemical reaction route induced under X-ray irradiation. The development of this process using the X-ray-radiolysis-induced photochemical reaction in aqueous liquids enables us to achieve the rapid and easy operation of the synthesis, growth and immobilization of special nano/micro-scale complex materials or multifunctional composites.