論文

査読有り
2017年9月

Effect of chlorine doping on tribological properties of amorphous carbon films deposited by plasma-based ion implantation and deposition

TRIBOLOGY INTERNATIONAL
  • Yuuki Tokuta
  • ,
  • Takashi Itoh
  • ,
  • Takahiko Shiozaki
  • ,
  • Masahiro Kawaguchi
  • ,
  • Shinya Sasaki

113
開始ページ
377
終了ページ
382
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.triboint.2016.11.026
出版者・発行元
ELSEVIER SCI LTD

Many efforts to improve the tribological properties of amorphous carbon films have been reported. We used chlorine doping to reduce the friction coefficient of amorphous carbon films under non-lubricated conditions. This forms chlorine compounds, such as chlorinated tribofilm, at the sliding interface between films and counter parts. A friction test indicated a lower friction coefficient and lower attackability for chlorine-containing amorphous carbon films compared with hydrogenated amorphous carbon films. Time-of-flight secondary-ion mass spectroscopy (TOP-SIMS) confirmed the existence of chlorine-bonded ions along the wear track of chlorine-containing amorphous carbon films suggesting that chlorinated compounds improve the friction properties of these films.

Web of Science ® 被引用回数 : 4

リンク情報
DOI
https://doi.org/10.1016/j.triboint.2016.11.026
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000403623700042&DestApp=WOS_CPL

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