In this study, we aimed to control the structure of wear debris of DLC films by optimization of triboplasma occurred between sliding interface. To control the triboplasma phenomena, we focused on the optimization of electric conductivity of DLC films by boron doping. From the results of experiment, we confirmed that the electric conductivity is controllable by boron doping into the films, however, wear resistance of films were deteriorated. Based on these results, we focused on chlorine-doping into the films as a new method to improve the friction and wear properties of DLC films in non-lubricated conditions. As a results of test, we confirmed that the chlorine-doped films indicate superior friction properties compared with non-doped films. We revealed that the liquefied chlorinated tribofilm was formed at the sliding interface by friction. And it is thought that this tribofilm played a role of lubricants and reducing friction coefficient were achieved.