2013年
Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing
CIRP Annals - Manufacturing Technology
- ,
- 巻
- 62
- 号
- 1
- 開始ページ
- 315
- 終了ページ
- 318
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.cirp.2013.03.010
Fabricating super-smooth aspheric optics for future hard X-ray telescopes will require a new process chain. Whilst diamond turning of electroless nickel plating can generate ~100 nm P-V aspheric molding dies, associated turning marks must be removed before replication. An innovative two-step freeform finishing method is presented, that combines fluid jet and precessed bonnet polishing on a common 7-axis CNC platform. The removal rate and surface texture relationship of fluid jet with abrasive type and pressure is documented, and form correction demonstrated down to 27 nm P-V. A novel bonnet tool-pathing method called "continuous precessing" is then applied, which delivers super-smooth anisotropic surface texture of 0.28 nm rms. © 2013 CIRP.
- リンク情報
- ID情報
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- DOI : 10.1016/j.cirp.2013.03.010
- ISSN : 0007-8506
- eISSN : 1726-0604
- SCOPUS ID : 84878870299