論文

査読有り
2013年

Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing

CIRP Annals - Manufacturing Technology
  • Anthony Beaucamp
  • ,
  • Yoshiharu Namba

62
1
開始ページ
315
終了ページ
318
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.cirp.2013.03.010

Fabricating super-smooth aspheric optics for future hard X-ray telescopes will require a new process chain. Whilst diamond turning of electroless nickel plating can generate ~100 nm P-V aspheric molding dies, associated turning marks must be removed before replication. An innovative two-step freeform finishing method is presented, that combines fluid jet and precessed bonnet polishing on a common 7-axis CNC platform. The removal rate and surface texture relationship of fluid jet with abrasive type and pressure is documented, and form correction demonstrated down to 27 nm P-V. A novel bonnet tool-pathing method called "continuous precessing" is then applied, which delivers super-smooth anisotropic surface texture of 0.28 nm rms. © 2013 CIRP.

リンク情報
DOI
https://doi.org/10.1016/j.cirp.2013.03.010
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84878870299&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=84878870299&origin=inward
ID情報
  • DOI : 10.1016/j.cirp.2013.03.010
  • ISSN : 0007-8506
  • eISSN : 1726-0604
  • SCOPUS ID : 84878870299

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