Hideo Muro

J-GLOBAL         Last updated: Dec 4, 2018 at 05:26
 
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Name
Hideo Muro
Affiliation
Chiba Institute of Technology
Section
Faculty of Engineering, Department of Electrical,Electronics and Computer Engineering
Research funding number
00438912

Research Areas

 
 

Education

 
 
 - 
Mar 1978
The University of Tokyo
 

Published Papers

 
Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology
Jiannan Liu and Hideo Muro
Sensors and Materials   30(5) 1081-1090   Jun 2018   [Refereed]
In our previous work, we studied capacitive micro-accelerometers fabricated using a simple silicon-on-insulator (SOI)-MEMS technology and the feasibility of an accelero- meter with a beam length as long as the side length of the proof mass. In thi...
Jiannan Liu, Keisuke Hoshino and Hideo Muro
IEEJ Transactions on Sensors and Micromachines   138(6) 226-230   Jun 2018   [Refereed]
In order to realize much smaller accelerometers with still lower cost, a noble resonant accelerometer were proposed, where the proof mass is displaced by the applied acceleration in the electrostatic field between the comb electrodes, resulting in...
138(3) 112-116   Mar 2018   [Refereed]
In order to study an oscillator-type thermal micro flow sensor aimed at the low drift due to thermal stress and easy interface to CPU, prototype devices using SOI-MEMS technology were designed and fabricated, which were integrated in an oscillator...
Liu Jiannan, Hideo Muro
137(8) 247-251   Aug 2017   [Refereed]
This paper focuses on capacitive micro accelerometers fabricated using a simple SOI-MEMS technology calculates the dependences of their sensitivities and resonant frequencies on the beam parameter and its configuration, and studies a feasibility o...
A Study on Micro Thermal Flow Sensors Fabricated using SOI-MEMS Technology
Keisuke Hoshino, Hideo Muro
137(4) 101-106   Apr 2017   [Refereed]
Micro thermal flow sensors fabricated using SOI-MEMS technology have been proposed, aiming at incorporation of various sensors into a single silicon chip. This paper presents the results of the sensitivity calculation using a simple linear model, ...

Misc

 
K.Fujimoto, H.Muro, N.Shimomura, T.Oki, K.Maeda, Y.Kishi, M.Hagino
JSAE Review   23 383-385   May 2002   [Refereed]

Books etc

 
Handbokk of Surface and Interface Technology
Apr 2016   

Conference Activities & Talks

 
Optical Angle Detecting Sensor IC with High Resolution
H.Muro
The 6th Sensor Symposium   Jun 1986   
An Angle-of-rotation Sensor using Flip-flop Photodetecting Techniques
P.J.French, H. Muro, Y.Hiramoto, W.Lian
TRANSDUCERS'89   Jun 1989   
An Integrated Position Sensor using JFETs as a Buffer for PSD Output Signal
H.Muro, P.J.French
TRANSDUCERS'89   Jun 1989   
Optimization of Bipolar Magneto-Transistors
H.Kaneko, H.Muro, P.J.French
Micro System Technologies'90   Sep 1990   
SOI pressure Sensor
P.J.French, H.Muro, T.Shinohara, H.Nojiri, H.Kaneko
TRANSDUCERS'91   Jun 1991