Hideo Muro

J-GLOBAL         Last updated: Dec 4, 2018 at 05:26
Hideo Muro
Chiba Institute of Technology
Faculty of Engineering, Department of Electrical,Electronics and Computer Engineering
Research funding number

Research Areas



Mar 1978
The University of Tokyo

Published Papers

Miniaturization of MEMS Capacitive Accelerometers Fabricated Using Silicon-on-insulator-MEMS Technology
Jiannan Liu and Hideo Muro
Sensors and Materials   30(5) 1081-1090   Jun 2018   [Refereed]
In our previous work, we studied capacitive micro-accelerometers fabricated using a simple silicon-on-insulator (SOI)-MEMS technology and the feasibility of an accelero- meter with a beam length as long as the side length of the proof mass. In thi...
Jiannan Liu, Keisuke Hoshino and Hideo Muro
IEEJ Transactions on Sensors and Micromachines   138(6) 226-230   Jun 2018   [Refereed]
In order to realize much smaller accelerometers with still lower cost, a noble resonant accelerometer were proposed, where the proof mass is displaced by the applied acceleration in the electrostatic field between the comb electrodes, resulting in...
138(3) 112-116   Mar 2018   [Refereed]
In order to study an oscillator-type thermal micro flow sensor aimed at the low drift due to thermal stress and easy interface to CPU, prototype devices using SOI-MEMS technology were designed and fabricated, which were integrated in an oscillator...
Liu Jiannan, Hideo Muro
137(8) 247-251   Aug 2017   [Refereed]
This paper focuses on capacitive micro accelerometers fabricated using a simple SOI-MEMS technology calculates the dependences of their sensitivities and resonant frequencies on the beam parameter and its configuration, and studies a feasibility o...
A Study on Micro Thermal Flow Sensors Fabricated using SOI-MEMS Technology
Keisuke Hoshino, Hideo Muro
137(4) 101-106   Apr 2017   [Refereed]
Micro thermal flow sensors fabricated using SOI-MEMS technology have been proposed, aiming at incorporation of various sensors into a single silicon chip. This paper presents the results of the sensitivity calculation using a simple linear model, ...


K.Fujimoto, H.Muro, N.Shimomura, T.Oki, K.Maeda, Y.Kishi, M.Hagino
JSAE Review   23 383-385   May 2002   [Refereed]

Books etc

Handbokk of Surface and Interface Technology
Apr 2016   

Conference Activities & Talks

Optical Angle Detecting Sensor IC with High Resolution
The 6th Sensor Symposium   Jun 1986   
An Angle-of-rotation Sensor using Flip-flop Photodetecting Techniques
P.J.French, H. Muro, Y.Hiramoto, W.Lian
TRANSDUCERS'89   Jun 1989   
An Integrated Position Sensor using JFETs as a Buffer for PSD Output Signal
H.Muro, P.J.French
TRANSDUCERS'89   Jun 1989   
Optimization of Bipolar Magneto-Transistors
H.Kaneko, H.Muro, P.J.French
Micro System Technologies'90   Sep 1990   
SOI pressure Sensor
P.J.French, H.Muro, T.Shinohara, H.Nojiri, H.Kaneko
TRANSDUCERS'91   Jun 1991