2000
Short cycle killer-particle control based on accurate in-line defect classification
ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS
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- First page
- 199
- Last page
- 202
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- Publisher
- IEEE
We present a systematic yield ramp-up method that can quickly screen "killer" particles associated with yield loss and pinpoint their entry point to the process. The proposed method uses automatic defect classification (ADC) to segregate killer particles. The practicality of this method is demonstrated by the results of experiments using actual production wafers. This method will make killer particle control more timely.
- Link information
- ID information
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- Web of Science ID : WOS:000175610700045