In this paper, the state of art of ultrasonic-assisted machining technologies used for fabrication of micro/nano-textured surfaces is reviewed. Diamond machining is the most widely used method in industry for manufacturing precision parts. For fabrication of fine structures on surfaces, conventional diamond machining methods are competitive by considering the precision of structures, but have limitations at machinable structures and machining efficiency, which have been proved to be partly solved by the integration of ultrasonic vibration motion. In this paper, existing ultrasonic-assisted machining methods for fabricating fine surface structures are reviewed and classified, and a rotary ultrasonic texturing (RUT) technology is mainly introduced by presenting the construction of vibration spindles, the texturing principles, and the applications of textured surfaces. Some new ideas and experimental results are presented. Finally, the challenges in using the RUT method to fabricate micro/ nano-textured surfaces are discussed with respect to texturing strategies, machinable structures, and tool wear.