2020年
Preparation of Multielements Mixture Thin Film by One-Step Process Sputtering Deposition Using Mixture Powder Target
IEEE Transactions on Plasma Science
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- 巻
- 49
- 号
- 1
- 開始ページ
- 1
- 終了ページ
- 5
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/tps.2020.3025306
- 出版者・発行元
- Institute of Electrical and Electronics Engineers (IEEE)
Thin films consisting of a mixture of indium, gallium, zinc, and oxygen were fabricated for use as transparent conductive films for liquid crystal and/or electroluminescent displays. The thin films were produced in one step by a sputtering deposition method using mixed powder targets with different proportions of indium oxide, gallium oxide, and zinc oxide. The deposition rate of the films strongly depended on the composition of the target. X-ray photoelectron spectroscopy results revealed that mixed indium, gallium, zinc, and oxygen thin films can be prepared and their element concentration ratio is controlled by the concentration ratio of the powder target.
- リンク情報
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- DOI
- https://doi.org/10.1109/tps.2020.3025306
- URL
- http://xplorestaging.ieee.org/ielx7/27/4360151/09210009.pdf?arnumber=9210009
- Scopus
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85099480526&origin=inward
- Scopus Citedby
- https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85099480526&origin=inward
- ID情報
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- DOI : 10.1109/tps.2020.3025306
- ISSN : 0093-3813
- eISSN : 1939-9375
- SCOPUS ID : 85099480526