MISC

査読有り
2003年

Ab initio simulation on deposit process of Al on Si surface

NANOTECH 2003, VOL 3
  • Y Umeno
  • ,
  • T Kitamura

3
開始ページ
215
終了ページ
218
記述言語
英語
掲載種別
出版者・発行元
COMPUTATIONAL PUBLICATIONS

It is important to clarify structure of contact between different materials for evaluation of properties of interfaces, which are substantial in electronic devices. Since interaction between different materials has to be evaluated based oil the quantum mechanics, precise simulation of formation process of the contact using ab initio method should be conducted so as to elucidate its structure and properties. In this study, in order to examine structure and strength of Si/Al contact, an ab initio molecular dynamics simulation of deposit of Al atoms onto Si substrate is conducted. Si-(100) surface model with 128 items is introduced and Al atoms are precipitated from above. At first, Al atoms are settled above a ditch between dimer rows of the Si surface and are arranged in a line. After the ditch is filled with the Al atoms, Al atoms are adhered near the line and they construct bonds with each other and with Si atoms in the dimers as well. Consequently, a dense Al layer is formed on the Si surface.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000223047000059&DestApp=WOS_CPL
ID情報
  • Web of Science ID : WOS:000223047000059

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