A series of irradiation experiments with 150 MeV protons was performed. The relationship between target depth (or shield thickness) and displacement damage during proton irradiation was obtained by in situ electrical resistance measurements at 20 K. Positron annihilation lifetime measurements were also performed at room temperature after irradiation, as a function of the target thickness. The displacement damage was found to be high close to the beam incident surface area, and decreased with increasing target depth. The experimental results were compared with damage production calculated with an advanced Monte Carlo particle transport code system (PHITS). (C) 2014 Elsevier B.V. All rights reserved.