2006年4月25日
入力・横揺れ制約を考慮した真空環境用二軸ウエハ搬送ロボットの制御系設計と実験による検証(機械力学,計測,自動制御)
日本機械学會論文集. C編
- ,
- ,
- 巻
- 72
- 号
- 716
- 開始ページ
- 1184
- 終了ページ
- 1193
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1299/kikaic.72.1184
- 出版者・発行元
- 一般社団法人日本機械学会
This paper considers the positioning control of wafer transfer robots. In order to improve the productivity of semiconductors, the control system for wafer transfer robots is required to achieve high-speed transfer and highly accurate positioning. However, it is not easy to achieve such performance since the robots have non-linear properties. In this paper, we consider the positioning control of the robots by switching controllers which are designed using Loop Shaping Design Procedure. We evaluate the effectiveness of this proposed method through experiments.
- リンク情報
- ID情報
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- DOI : 10.1299/kikaic.72.1184
- ISSN : 0387-5024
- CiNii Articles ID : 110004718597
- CiNii Books ID : AN00187463