2018年5月11日
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings
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- 開始ページ
- 1
- 終了ページ
- 2
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1109/ISISS.2018.8358156
- 出版者・発行元
- Institute of Electrical and Electronics Engineers Inc.
In this paper, we proposed a non-uniform radial width design of mode-matched vibratory ring gyroscope (VRG) to compensate the anisotropy in in-plane Young's modulus of (100) single crystal silicon (SCS). The measured frequency splits of the 'wineglass' modes for VRGs with uniform width and modified width were about 180 and 46 Hz, respectively, which shows good agreement with the simulated results by finite element analysis (FEA). Then the electrostatic tuning was applied to eliminate frequency splits and realize mode-matching.
- リンク情報
- ID情報
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- DOI : 10.1109/ISISS.2018.8358156
- SCOPUS ID : 85048447147