2011年
Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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- 開始ページ
- 1241
- 終了ページ
- 1245
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1109/NEMS.2011.6017582
This paper reports transient equivalent circuit analysis for self-induced oscillation of micromechanical resonator using a novel component model of an electrostatic comb transducer. The model with built-in displacement detection can analyze dc operating points which depends on both on electrical and mechanical biases. By using the proposed model, we analyzed the bias voltage dependency of oscillation risetime and amplitude. From comparing the analysis and measurement of start-up transient response of an SOG (silicon-on-glass) resonator, we showed the proposed comb model facilitate designing and estimate oscillator performance. © 2011 IEEE.
- リンク情報
- ID情報
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- DOI : 10.1109/NEMS.2011.6017582
- SCOPUS ID : 80053296386