論文

2018年

3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価

マイクロ・ナノ工学シンポジウム
  • 辻 勇亮
  • ,
  • 平井 義和
  • ,
  • 亀井 謙一郎
  • ,
  • 土屋 智由
  • ,
  • 田畑 修

2018
0
開始ページ
31am3PN133
終了ページ
記述言語
日本語
掲載種別
DOI
10.1299/jsmemnm.2018.9.31am3PN133
出版者・発行元
一般社団法人 日本機械学会

<p>Body-on-a-Chip (BoC) platform holds a great potential for new pre-clinical tests in drug screening as in vitro human models. However, there is still a technological challenge to integrate a pressure sensor in BoC for monitoring or controlling pressure, leading to mimic in vivo physiological conditions. Among existing PDMS-based pressure sensors, ionic liquid-based pressure sensor is a promising approach, since this sensor can be directly integrated into BoC platform. However previously reported sensors lack performance with respect to sensitivity in low pressure. In this report, we propose a novel fabrication approach that can improve sensitivity of ionic liquid-based pressure sensor by using three-dimensional lithography. We demonstrated the improvement of sensitivity by proposed approach, and also showed the possibility to fabricate the sensor with good response to dynamic pressure input.</p>

リンク情報
DOI
https://doi.org/10.1299/jsmemnm.2018.9.31am3PN133
CiNii Articles
http://ci.nii.ac.jp/naid/130007654678
ID情報
  • DOI : 10.1299/jsmemnm.2018.9.31am3PN133
  • CiNii Articles ID : 130007654678

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