2018年
3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価
マイクロ・ナノ工学シンポジウム
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- 巻
- 2018
- 号
- 0
- 開始ページ
- 31am3PN133
- 終了ページ
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1299/jsmemnm.2018.9.31am3PN133
- 出版者・発行元
- 一般社団法人 日本機械学会
<p>Body-on-a-Chip (BoC) platform holds a great potential for new pre-clinical tests in drug screening as in vitro human models. However, there is still a technological challenge to integrate a pressure sensor in BoC for monitoring or controlling pressure, leading to mimic in vivo physiological conditions. Among existing PDMS-based pressure sensors, ionic liquid-based pressure sensor is a promising approach, since this sensor can be directly integrated into BoC platform. However previously reported sensors lack performance with respect to sensitivity in low pressure. In this report, we propose a novel fabrication approach that can improve sensitivity of ionic liquid-based pressure sensor by using three-dimensional lithography. We demonstrated the improvement of sensitivity by proposed approach, and also showed the possibility to fabricate the sensor with good response to dynamic pressure input.</p>
- リンク情報
- ID情報
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- DOI : 10.1299/jsmemnm.2018.9.31am3PN133
- CiNii Articles ID : 130007654678