In this study, a hybrid four-point bending test method using the response surface method and the finite element analysis is proposed for determining the mechanical properties of thin films. The proposed method has two advantages: (1) it results in improved measurement accuracy because calculations are performed under conditions that are similar to the experimental conditions and take into account the contact phenomenon between the specimen and a load applicator
and (2) the method can be used to calculate not only the Young's modulus but also the Poisson's ratio. To evaluate the proposed method, 1050 aluminum alloy and electroless Ni-P depositions were examined. The examination results show that it is possible to measure the Young's modulus and the Poisson's ratio of thin films with improved accuracy by simulating the actual experimental conditions into account as accurately as possible. © 2010 SPIE.