論文

査読有り
2020年4月

Epitaxial Growth and Bandgap Control of Ni1-xMgxO Thin Film Grown by Mist Chemical Vapor Deposition Method

MRS Advances
  • Takumi Ikenoue
  • ,
  • Satoshi Yoneya
  • ,
  • Masao Miyake
  • ,
  • Tetsuji Hirato

5
31-32
開始ページ
1
終了ページ
8
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1557/adv.2020.219
出版者・発行元
CAMBRIDGE UNIV PRESS

Wide-bandgap oxide semiconductors have received significant attention as they can produce devices with high output and breakdown voltage. p-Type conductivity control is essential to realize bipolar devices. Therefore, as a rare wide-bandgap p-type oxide semiconductor, NiO (3.7 eV) has garnered considerable attention. In view of the heterojunction device with Ga2O3 (4.5-5.0 eV), a p-type material with a large bandgap is desired. Herein, we report the growth of a Ni1-xMgxO thin film, which has a larger bandgap than NiO, on alpha-Al2O3 (0001) substrates that was developed using the mist chemical vapor deposition method. The Ni1-xMgxO thin films epitaxially grown on alpha-Al2O3 substrates showed crystallographic orientation relationships identical to those of NiO thin films. The Mg composition of Ni1-xMgxO was easily controlled by the Mg concentration of the precursor solution. The Ni1-xMgxO thin film with a higher Mg composition had a larger bandgap, and the bandgap reached 3.9 eV with a Ni1-xMgxO thin film with x = 0.28. In contrast to an undoped Ni1-xMgxO thin film showing insulating properties, the Li-doped Ni1-xMgxO thin film had resistivities of 10(1)-10(5) Omega cm depending on the Li precursor concentration, suggesting that Li effectively acts as an acceptor.

リンク情報
DOI
https://doi.org/10.1557/adv.2020.219
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000545103700010&DestApp=WOS_CPL
ID情報
  • DOI : 10.1557/adv.2020.219
  • ISSN : 2059-8521
  • Web of Science ID : WOS:000545103700010

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