Cu2Sb-type intermetallic compound, MnAlGe, is known to exhibit uniaxial magnetocrystalline anisotropy and relatively small saturation magnetization, which is suitable for spintronic application, e.g. spin-transfer phenomena requiring small critical current density. Ge-concentration dependence of the crystal structures, saturation magnetization, M-s, and perpendicular magnetic anisotropy, K-u was investigated for MnAlGe films prepared onto silicon substrates with a thermally oxidized amorphous layer. For the stoichiometric and Ge-rich samples, the films exhibited (001)-texture with perpendicular magnetization. The maximum values of M-s and K-u were 270 emu/cm(3) and 4.8 x 106 erg/cm(3), respectively, which were comparable values with those reported for bulk and epitaxially grown films in literatures. (c) 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).