Sep 20, 2021
Elimination of Oxygen Defects in In-Si-O Film and Thin Film Transistor Performance
Solid State Phenomena
- ,
- Volume
- 324
- Number
- First page
- 81
- Last page
- 86
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.4028/www.scientific.net/SSP.324.81
- Publisher
- Trans Tech Publications Ltd
- Link information
- ID information
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- DOI : 10.4028/www.scientific.net/SSP.324.81
- ISSN : 1662-9779