Papers

Peer-reviewed
Sep 20, 2021

Elimination of Oxygen Defects in In-Si-O Film and Thin Film Transistor Performance

Solid State Phenomena
  • E. K. Palupi
  • ,
  • A. Fujiwara

Volume
324
Number
First page
81
Last page
86
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.4028/www.scientific.net/SSP.324.81
Publisher
Trans Tech Publications Ltd

Link information
DOI
https://doi.org/10.4028/www.scientific.net/SSP.324.81
ID information
  • DOI : 10.4028/www.scientific.net/SSP.324.81
  • ISSN : 1662-9779

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