A newly developed multi-wire electrical discharge machining (EDM) method would accomplish the high performance slicing of silicon and silicon carbide with a narrow kerf width under a clean process environment. However, the thinner wire is challenging process with a normal round shape wire electrode. Therefore, a new wire electrode with track-shaped section was proposed in order to satisfy both the narrow kerf width and the high wire tension even in the case of thin wire electrode. In this study, the running control of wire electrode with track-shaped section was experimentally investigated, and the possibility of proposed process was discussed. A brass coated steel wire electrode with track-shaped section of aspect ratio 1:2 could perform the smaller vibration and the stable running up to 300 m/min. The side support method with fixture plates could improve the running stability of brass coated steel wire electrode with track-shaped section and reduce the kerf width. The brass coated steel wire electrode with track-shaped section could accomplish the uniform and straight kerf shape by increasing the wire tension.