論文

査読有り
2016年8月

Active voltage contrast imaging of cross-sectional surface of multilayer ceramic capacitor using helium ion microscopy

APPLIED PHYSICS LETTERS
  • C. Sakai
  • ,
  • N. Ishida
  • ,
  • H. Masuda
  • ,
  • S. Nagano
  • ,
  • M. Kitahara
  • ,
  • Y. Ogata
  • ,
  • D. Fujita

109
5
開始ページ
051603-1
終了ページ
051603-4
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.4960524
出版者・発行元
AMER INST PHYSICS

We studied active voltage contrast (AVC) imaging using helium ion microscopy (HIM). We observed secondary electron (SE) images of the cross-sectional surface of multilayer ceramic capacitors (MLCCs) with and without a voltage applied to the internal electrodes. When no voltage was applied, we obtained an image reflecting the material contrast between the Ni internal electrode region and the BaTiO3 dielectric region of the cross-sectional surface of the MLCC. When a voltage was applied, the electrical potential difference between the grounded and the positively biased internal electrodes affected the contrast (voltage contrast). Moreover, attenuation of the SE intensity from the grounded to the positively biased internal electrodes was observed in the dielectric region. Kelvin probe force microscopy (KPFM) measurements of the contact potential difference (CPD) were performed on the same sample. By using the AVC image from the HIM observation and the CPD image from the KPFM measurement, we could quantitatively evaluate the electrical potential. We think that the results of this study will lead to an expansion in the number of applications of HIM. Published by AIP Publishing.

Web of Science ® 被引用回数 : 3

リンク情報
DOI
https://doi.org/10.1063/1.4960524
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000383091400010&DestApp=WOS_CPL

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