2019年9月 Suppression of Vibration Induced by Reciprocal Motion of Displacer in Cryopump with an Active Dynamic Vibration Absorber IFAC MECHATRONICS & NOLCOS 2019 Takeshi MIZUNO, Takahito IIDA, Yuji ISHINO, Masaya TAKASAKI, Daisuke YAMAGUCHI 記述言語 英語 会議種別