2014年11月
Development of organic SIMS system with Ar-GCIB and IMS-4f
SURFACE AND INTERFACE ANALYSIS
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- 巻
- 46
- 号
- 開始ページ
- 368
- 終了ページ
- 371
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1002/sia.5671
- 出版者・発行元
- WILEY
We have developed Ar-gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar-GCIB column to IMS-4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10nm depth resolutions. Secondary ion images of fine-patterned PS are observed within 10 mu m image resolutions. Copyright (c) 2014 John Wiley & Sons, Ltd.
- リンク情報
- ID情報
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- DOI : 10.1002/sia.5671
- ISSN : 0142-2421
- eISSN : 1096-9918
- Web of Science ID : WOS:000345696200092