2020年
Construction of thin-film coating system toward the realization of superconducting multilayered structure
Proceedings of the 29th Linear Accelerator Conference, LINAC 2018
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- 開始ページ
- 445
- 終了ページ
- 447
- 記述言語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.18429/JACoW-LINAC2018-TUPO050
Content from this work may be used under the terms of the CC BY 3.0 licence (© 2018) Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. In this study, we prepared several NbN-SiO2-Nb multilayered samples which have different NbN film thickness to investigate the film thickness dependence of effective Hc1 of S-I-S multilayered samples. In addition, we launched the co-sputtering system to get Nb3Sn thin-film samples. The deposition rates of Nb and Sn cathodes were measured, and then the two cathodes were simultaneously sputtered aiming at appropriate composition ratio. Furthermore, we developed another experimental apparatus for coating on the inner surface of the 3 GHz TESLA type small cavities. A cylindrical Nb cathode was fabricated, and glow discharge was confirmed. This paper reports the specification of the two sputtering apparatuses and future experiment plans for demonstration and realizing of S-I-S multilayered cavities.
- リンク情報
- ID情報
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- DOI : 10.18429/JACoW-LINAC2018-TUPO050
- SCOPUS ID : 85086315905