論文

査読有り
2020年

Construction of thin-film coating system toward the realization of superconducting multilayered structure

Proceedings of the 29th Linear Accelerator Conference, LINAC 2018
  • R. Ito
  • ,
  • T. Nagata
  • ,
  • H. Hayano
  • ,
  • T. Kubo
  • ,
  • T. Saeki
  • ,
  • Y. Iwashita
  • ,
  • R. Katayama
  • ,
  • H. Ito
  • ,
  • H. Oikawa

開始ページ
445
終了ページ
447
記述言語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.18429/JACoW-LINAC2018-TUPO050

Content from this work may be used under the terms of the CC BY 3.0 licence (© 2018) Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. In this study, we prepared several NbN-SiO2-Nb multilayered samples which have different NbN film thickness to investigate the film thickness dependence of effective Hc1 of S-I-S multilayered samples. In addition, we launched the co-sputtering system to get Nb3Sn thin-film samples. The deposition rates of Nb and Sn cathodes were measured, and then the two cathodes were simultaneously sputtered aiming at appropriate composition ratio. Furthermore, we developed another experimental apparatus for coating on the inner surface of the 3 GHz TESLA type small cavities. A cylindrical Nb cathode was fabricated, and glow discharge was confirmed. This paper reports the specification of the two sputtering apparatuses and future experiment plans for demonstration and realizing of S-I-S multilayered cavities.

リンク情報
DOI
https://doi.org/10.18429/JACoW-LINAC2018-TUPO050
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85086315905&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85086315905&origin=inward
ID情報
  • DOI : 10.18429/JACoW-LINAC2018-TUPO050
  • SCOPUS ID : 85086315905

エクスポート
BibTeX RIS