In this article, we report a new particle-excitation flow control valve. The purpose of this study is the development of a particle-excitation flow control valve that can precisely control pneumatic cylinders. We have reported this flow control valve principle. The valve, driven by a PZT vibrator, has a simple lightweight structure with large flow rate. We report the relationship between the orifice arrangement and flow rate characteristics of the valve. We have designed a new prototype for the purpose of high controllability. We have measured flow-rate characteristics and confirmed the conditions necessary for continuous adjustment of flow quantity. The control valve works successfully to realize a change in flow rate. (C) 2011 Elsevier B.V. All rights reserved.