1999年7月
A rod-shaped vibro touch sensor using PZT thin film
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- ,
- ,
- ,
- 巻
- 46
- 号
- 4
- 開始ページ
- 875
- 終了ページ
- 882
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/58.775653
We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact. © 1999 IEEE.
- リンク情報
- ID情報
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- DOI : 10.1109/58.775653
- ISSN : 0885-3010
- SCOPUS ID : 0032645817