論文

査読有り
1999年7月

A rod-shaped vibro touch sensor using PZT thin film

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  • Takefumi Kanda
  • ,
  • Takeshi Morita
  • ,
  • Minoru Kuribayashi Kurosawa
  • ,
  • Toshiro Higuchi

46
4
開始ページ
875
終了ページ
882
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1109/58.775653

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact. © 1999 IEEE.

リンク情報
DOI
https://doi.org/10.1109/58.775653
ID情報
  • DOI : 10.1109/58.775653
  • ISSN : 0885-3010
  • SCOPUS ID : 0032645817

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