基本情報

所属
アイオーコア株式会社 プリンシパルエンジニア・シリコンフォトニクスプロセス
学位
修士(工学)(1988年3月 京都大学大学院)
博士(工学)(2007年3月 広島大学大学院)

研究者番号
40821773
ORCID iD
 https://orcid.org/0000-0003-2932-4984
J-GLOBAL ID
200901090253681176
Researcher ID
U-1172-2017
researchmap会員ID
5000071841

外部リンク

Research scientist in the field of device fabrication processes.
Plasma processes especially for BEOL, Silicon Photonics and Spintronics devices were his major fields.
Currently, his target is wafer process integration of "Optical I/O Core" device which is a siliconphotonics device for 5G and more technology.
He is an expert of plasma diagnostics, and chemical/physical reaction analysis.
He has enough experiences to conduct research works in joint research programs in his carrier.


論文

  90

MISC

  24

共同研究・競争的資金等の研究課題

  1