2013年7月
Thermochromic VO2 nanorods made by sputter deposition: Growth conditions and optical modeling
JOURNAL OF APPLIED PHYSICS
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- 巻
- 114
- 号
- 3
- 開始ページ
- 033516-11
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.4813876
- 出版者・発行元
- AMER INST PHYSICS
Reactive dc magnetron sputtering onto glass-based substrates yielded deposits of thermochromic VO2 with well-developed nanorods and nanowires. Their formation was promoted by high substrate temperature (above similar to 500 degrees C), sufficient film thickness, proper inlet of the reactive gas, dispersed gold "seeds," and pronounced substrate roughness. Rutherford back scattering ascertained mass thicknesses, scanning electron microscopy depicted the nanostructures, and glancing incidence X-ray diffraction proved that single-phase VO2 was normally formed. Spectrophotometric measurements of total and diffuse transmittance and reflectance on VO2 thin films, at room temperature and similar to 100 degrees C, allowed us to determine complex dielectric functions below and above the "critical" temperature for thermochromic switching (similar to 68 degrees C). These data were then used in computations based on the Bruggeman effective medium theory applied to randomly oriented prolate spheroidal structural units to derive the optical properties of the deposits. Experimental and computed data on spectral absorptance were found to be in good qualitative agreement. (C) 2013 AIP Publishing LLC.
- リンク情報
- ID情報
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- DOI : 10.1063/1.4813876
- ISSN : 0021-8979
- eISSN : 1089-7550
- Web of Science ID : WOS:000322202700031