論文

査読有り
2007年6月

Anisotropic deformation of thin films comprised of helical nanosprings

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
  • Hiroyuki Hirakata
  • ,
  • Shohei Matsumoto
  • ,
  • Masaki Takemura
  • ,
  • Motofumi Suzuki
  • ,
  • Takayuki Kitamura

44
11-12
開始ページ
4030
終了ページ
4038
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.ijsolstr.2006.11.005
出版者・発行元
PERGAMON-ELSEVIER SCIENCE LTD

We investigate the mechanical anisotropy of thin films that consist of tantalum oxide (Ta(2)O(5)) helical nanosprings fabricated by dynamic oblique deposition. Not only the vertical but also the lateral stiffness of thin films is evaluated using specimens in which nanosprings are sandwiched between solid Ta(2)O(5) layers. Lateral or vertical force is applied to the upper solid layer by a diamond tip built into an AFM. In particular, the lateral stiffness of a nanospring has never been reported before. Apparent shear and Young's moduli, G ' and E ', of the thin films are 2-3 orders smaller than those of solid Ta(2)O(5) film. Ratio E '/G ' of the two different nanosprings is 3.4 and 6.2, and about 2.5 for the solid film. The thin films show strong characteristic anisotropy that the solid one could hardly attain. The stiffness and its anisotropy strongly depend on nanospring shape. (C) 2006 Elsevier Ltd. All rights reserved.

リンク情報
DOI
https://doi.org/10.1016/j.ijsolstr.2006.11.005
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000246943400026&DestApp=WOS_CPL
URL
http://www.sciencedirect.com/science/article/B6VJS-4M93KRT-4/2/d5590c378596a15a4610ce4e5392a1a0
ID情報
  • DOI : 10.1016/j.ijsolstr.2006.11.005
  • ISSN : 0020-7683
  • Web of Science ID : WOS:000246943400026

エクスポート
BibTeX RIS