2007年4月
Structure and mechanical properties of arc evaporated Ti-Al-O-N thin films
SURFACE & COATINGS TECHNOLOGY
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- 巻
- 201
- 号
- 14
- 開始ページ
- 6392
- 終了ページ
- 6403
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.surfcoat.2006.12.006
- 出版者・発行元
- ELSEVIER SCIENCE SA
The structure, mechanical properties, and machining performance of arc evaporated Ti-Al-O-N coatings have been investigated for an Al0.66Ti0.34 target composition and O-2/(O-2+N-2) gas flow-ratio varied between 0 to 24%. The coating structure was analysed using SEM, EDX, XRD, XPS, TEM, and STEM. Mechanical properties were analysed using nanoindentation and the deformation behaviour was analysed by probing the nanoindentation craters. The coatings performances in cutting tests were evaluated in a turning application in low carbon steel (DIN Ck45). It is shown that the addition of oxygen into the arc deposition process leads to the formation of a dual layer structure. It consists of an initial cubic NaCl-structure solid solution phase formed closest to the substrate, containing up to 35 at.% oxygen (O/O+N), followed by steady-state growth of a nanocomposite compound layer comprised of Al2O3, AlN, TiN, and Ti(O,N). The addition of oxygen increases the ductility of the coatings, which improves the performances in cutting tests. At high levels of oxygen, (> 13 at.%), however, the performance is dramatically reduced as a result of increased crater wear. (c) 2006 Elsevier B.V. All rights reserved.
- リンク情報
- ID情報
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- DOI : 10.1016/j.surfcoat.2006.12.006
- ISSN : 0257-8972
- Web of Science ID : WOS:000245065200030