論文

査読有り
2019年4月1日

Crystal growth of a MnS buffer layer for non-polar AIN on Si (100) deposited by radio frequency magnetron sputtering

JAPANESE JOURNAL OF APPLIED PHYSICS
  • Tatejima Kota
  • ,
  • Nagata Takahiro
  • ,
  • Ishibashi Keiji
  • ,
  • Takahashi Kenichiro
  • ,
  • Suzuki Setsu
  • ,
  • Ogura Atsushi
  • ,
  • Chikyow Toyohiro

58
SB
記述言語
掲載種別
研究論文(学術雑誌)
DOI
10.7567/1347-4065/aafd8e

リンク情報
DOI
https://doi.org/10.7567/1347-4065/aafd8e
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000464309900125&DestApp=WOS_CPL
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85065209140&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85065209140&origin=inward
ID情報
  • DOI : 10.7567/1347-4065/aafd8e
  • ISSN : 0021-4922
  • eISSN : 1347-4065
  • SCOPUS ID : 85065209140
  • Web of Science ID : WOS:000464309900125

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