2021年3月1日
バイオセンシングを指向したフィルタフリー蛍光センサの近紫外光検出能の向上
電気学会論文誌E(センサ・マイクロマシン部門誌)
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- 巻
- 141
- 号
- 3
- 開始ページ
- 77
- 終了ページ
- 82
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1541/ieejsmas.141.77
- 出版者・発行元
- 一般社団法人 電気学会
<p>Detection performance of filter-free fluorescence sensors in the near-ultraviolet region has improved in this study. Thinner polycrystalline-Si film and indium tin oxide film were introduced as materials of photogate which required high transparency for sensitive measurement. Optical property of the photogate material was evaluated. Filter-free fluorescence sensors which have photogates with high optical transmittance were fabricated based on standard CMOS process. As results of a demonstration which emulates separate detection of excitation light and fluorescence by the fabricated filter-free sensors, detection performance in the near-ultraviolet region has improved a hundredfold compared to a previous sensor.</p>
- リンク情報
- ID情報
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- DOI : 10.1541/ieejsmas.141.77
- ISSN : 1341-8939
- eISSN : 1347-5525
- CiNii Articles ID : 130007993096
- CiNii Books ID : AN1052634X