2016年3月
Temperature-modulated annealing of c-plane sapphire for long-range-ordered atomic steps
JOURNAL OF PHYSICS D-APPLIED PHYSICS
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- 巻
- 49
- 号
- 11
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1088/0022-3727/49/11/115302
- 出版者・発行元
- IOP PUBLISHING LTD
High-quality single-crystalline sapphire is used to prepare various semiconductors because of its thermal stability. Here, we applied the tempering technique, which is well known in the production of chocolate, to prepare a sapphire substrate. Surprisingly, we successfully realised millimetre-range ordering of the atomic step of the sapphire substrate. We also obtained a sapphire atomic step with nanometre-scale uniformity in the terrace width and atomic-step height. Such sapphire substrates will find applications in the preparation of various semiconductors and devices.
- リンク情報
- ID情報
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- DOI : 10.1088/0022-3727/49/11/115302
- ISSN : 0022-3727
- eISSN : 1361-6463
- Web of Science ID : WOS:000371007100018