2014年5月
Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution
APPLIED PHYSICS EXPRESS
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- 巻
- 7
- 号
- 5
- 開始ページ
- 056602
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.7567/APEX.7.056602
- 出版者・発行元
- IOP PUBLISHING LTD
Recent developments in cluster ion beams for secondary ion mass spectrometry (SIMS) have enabled the realization of molecular depth profiling and mass imaging of organic and biological materials. Massive Ar cluster beams present reduced surface damage and fragmented ion generation and are suitable as primary beams for SIMS. We recently obtained a finely focused massive 1.2-mu m-diameter cluster ion beam and combined it with an orthogonal acceleration time-of-flight mass spectrometer. A mesh pattern of a phospholipid thin film was clearly reproduced in the mass images of molecular ions with a measurement time of 100 s. (C) 2014 The Japan Society of Applied Physics
- リンク情報
- ID情報
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- DOI : 10.7567/APEX.7.056602
- ISSN : 1882-0778
- eISSN : 1882-0786
- Web of Science ID : WOS:000336693500030