2007年4月
Effect of oblique irradiation of gas cluster ion beam on surface properties of gold mirrors
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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- 巻
- 257
- 号
- 開始ページ
- 649
- 終了ページ
- 652
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.nimb.2007.01.054
- 出版者・発行元
- ELSEVIER SCIENCE BV
Oblique irradiation of gas cluster ion beam (GCIB) is a promising technique for polishing of vertical mirrors in micro-electro-mechanical-systems (MEMS) optical devices. The relationship between reflection properties an surface profiles was examined for gold mirrors fabricated by a similar process to MEMS vertical mirrors. The intensity of the diffuse light reflected by the gold mirror was substantially reduced by the oblique irradiation of GCIB, which could be explained in terms of the decrease of the surface roughness. By comparing surface profiles of the mirror after GCIB irradiation at different incident angles and using two gas species, characteristics of the oblique irradiation of GCIB were clarified. (c) 2007 Elsevier B.V. All rights reserved.
- リンク情報
- ID情報
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- DOI : 10.1016/j.nimb.2007.01.054
- ISSN : 0168-583X
- Web of Science ID : WOS:000246165500148