論文

査読有り
2006年1月

ITO surface smoothing with argon cluster ion beam

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
  • C Heck
  • ,
  • T Seki
  • ,
  • T Oosawa
  • ,
  • M Chikamatsu
  • ,
  • N Tanigaki
  • ,
  • T Hiraga
  • ,
  • J Matsuo

242
1-2
開始ページ
140
終了ページ
142
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.nimb.2005.08.062
出版者・発行元
ELSEVIER SCIENCE BV

Argon gas cluster ion beam (GCIB) was employed to improve the surface smoothness of indium tin oxide (ITO) substrates. The dependence of the smoothness as well as of the sputtered depth on cluster ion energy and dose has been studied. Results show that relatively low-energy (10 keV) clusters with mean size of 2000 Ar atoms are sufficient to reduce the mean roughness of the ITO surface to about one fourth of its initial value.
Organic electroluminescent (EL) devices (alpha-NPD/Alq(3)/Mg-Ag) were formed on the smoothed surfaces and a considerable improve of the devices' EL efficiency was observed. (c) 2005 Elsevier B.V. All rights reserved.

リンク情報
DOI
https://doi.org/10.1016/j.nimb.2005.08.062
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000236225200037&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.nimb.2005.08.062
  • ISSN : 0168-583X
  • Web of Science ID : WOS:000236225200037

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