1997年1月
STM observation of HOPG surfaces irradiated with Ar cluster ions
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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- 巻
- 121
- 号
- 1-4
- 開始ページ
- 498
- 終了ページ
- 502
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/s0168-583x(96)00557-5
- 出版者・発行元
- ELSEVIER SCIENCE BV
Cluster ion beams offer new surface modification processes because of their unique interaction between cluster atoms and solid surfaces, For example, surface smoothing and shallow implantation by cluster ion beam have been demonstrated. Ln order to reveal such cluster-surface interaction, a single trace formed by a cluster ion impact on a solid surface has been investigated using Scanning Tunneling Microscopy (STM).
STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 Angstrom were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.
STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 Angstrom were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.
- リンク情報
- ID情報
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- DOI : 10.1016/s0168-583x(96)00557-5
- ISSN : 0168-583X
- Web of Science ID : WOS:A1997WH94300108