論文

査読有り 最終著者 責任著者
2015年12月28日

Effect of Epitaxial Growth of Gold Nanoparticles on Si Substrates on Adhesion of Electrolessly Deposited Metal Films

ECS Transactions
  • N. Yamada
  • ,
  • H. Atsushiba
  • ,
  • S. Sakamoto
  • ,
  • N. Fukumuro
  • ,
  • S. Yae

69
39
開始ページ
59
終了ページ
63
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1149/06939.0059ecst
出版者・発行元
The Electrochemical Society

Electrolessly deposited metal films on silicon substrates using gold nanoparticles as catalysts yield much higher adhesion than that by using palladium or silver nanoparticles. In this study, the structure of the gold nanoparticles is analyzed by X-ray diffraction and transmission electron microscopy. Single crystalline gold nanoparticles are epitaxially deposited on silicon substrates and silicon-gold alloy is formed at the interface. Those epitaxially grown gold nanoparticles cause the high adhesion of electrolessly deposited nickel films on silicon substrates.

リンク情報
DOI
https://doi.org/10.1149/06939.0059ecst
共同研究・競争的資金等の研究課題
貴金属ナノ粒子のシリコンへの無電解析出のグリーンサステイナブル展開
URL
https://syndication.highwire.org/content/doi/10.1149/06939.0059ecst
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84959303349&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=84959303349&origin=inward
ID情報
  • DOI : 10.1149/06939.0059ecst
  • ISSN : 1938-6737
  • eISSN : 1938-5862
  • ISBN : 9781607685395
  • SCOPUS ID : 84959303349

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