論文

査読有り
2020年9月7日

Optimal Control of SiC Crystal Growth in the RF-TSSG System Using Reinforcement Learning

Crystals
  • Lei Wang
  • ,
  • Atsushi Sekimoto
  • ,
  • Yuto Takehara
  • ,
  • Yasunori Okano
  • ,
  • Toru Ujihara
  • ,
  • Sadik Dost

10
9
開始ページ
791
終了ページ
791
記述言語
掲載種別
研究論文(学術雑誌)
DOI
10.3390/cryst10090791
出版者・発行元
MDPI AG

We have developed a reinforcement learning (RL) model to control the melt flow in the radio frequency (RF) top-seeded solution growth (TSSG) process for growing more uniform SiC crystals with a higher growth rate. In the study, the electromagnetic field (EM) strength is controlled by the RL model to weaken the influence of Marangoni convection. The RL model is trained through a two-dimensional (2D) numerical simulation of the TSSG process. As a result, the growth rate under the control of the RL model is improved significantly. The optimized RF-coil parameters based on the control strategy for the 2D melt flow are used in a three-dimensional (3D) numerical simulation for model validation, which predicts a higher and more uniform growth rate. It is shown that the present RL model can significantly reduce the development cost and offers a useful means of finding the optimal RF-coil parameters.

リンク情報
DOI
https://doi.org/10.3390/cryst10090791
URL
https://www.mdpi.com/2073-4352/10/9/791/pdf
ID情報
  • DOI : 10.3390/cryst10090791
  • eISSN : 2073-4352

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