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Asahiko Matsuda
(松田 朝彦)
Modified on: 06/13
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Nov, 2015
DPS Paper Award, Effects of straggling of incident ions on plasma-induced damage creation in "fin"-type field-effect transistors, 37th International Symposium on Dry Process
Koji Eriguchi, Asahiko Matsuda, Yoshinori Takao, Kouichi Ono
May, 2014
Young Oak Sapling Award, Kashinomekai
Asahiko Matsuda
Nov, 2011
Young Researcher Award, Advanced contactless analysis of plasma-induced damage on Si by temperature-controlled photoreflectance spectroscopy, 32nd International Symposium on Dry Process
Asahiko Matsuda
Aug, 2011
JSAP Outstanding Paper Award, Model for Bias Frequency Effects on Plasma-Damaged Layer Formation in Si Substrates, The Japan Society of Applied Physics
Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, Kouichi Ono
Nov, 2010
Best Paper Award, Threshold Voltage Instability Induced by Plasma Process Damage in Advanced MOSFETs, 31st International Symposium on Dry Process
Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, Kouichi Ono
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