論文

査読有り 国際共著
2016年

Modeling early breakdown failures of gate oxide in SiC power MOSFETs

IEEE Transactions on Electron Devices
  • Chbili, Z.
  • ,
  • Matsuda, A.
  • ,
  • Chbili, J.
  • ,
  • Ryan, J.T.
  • ,
  • Campbell, J.P.
  • ,
  • Lahbabi, M.
  • ,
  • Ioannou, D.E.
  • ,
  • Cheung, K.P.

63
9
開始ページ
3605
終了ページ
3613
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1109/TED.2016.2586483
出版者・発行元
Institute of Electrical and Electronics Engineers ({IEEE})

One of the most serious technology roadblocks for SiC DMOSFETs is the significant occurrence of early failures in time-dependent-dielectric-breakdown testing. Conventional screening methods have proved ineffective, because the remaining population is still plagued with poor reliability. The traditional local thinning model for extrinsic (early) failures, which guides the screening through burn-in measures, simply does not work. The fact that improved cleanliness control in the fabrication process does little to reduce early failures also suggests that local thinning due to contamination is not the root cause. In this paper, we propose a new lucky defect model where bulk defects in the gate oxide, introduced during growth, are responsible for the early failures. We argue that a local increase in leakage current via trap-assisted tunneling leads to early oxide breakdown. This argument is supported with oxide breakdown observations in SiC/SiO2 DMOSFETs, as well as simulations that examine various defect distributions and their impact on the resultant early failure distributions.

リンク情報
DOI
https://doi.org/10.1109/TED.2016.2586483
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000384574400036&DestApp=WOS_CPL
Scopus Url
http://www.scopus.com/inward/record.url?eid=2-s2.0-84978862983&partnerID=MN8TOARS
ID情報
  • DOI : 10.1109/TED.2016.2586483
  • ISSN : 0018-9383
  • eISSN : 1557-9646
  • ORCIDのPut Code : 60905071
  • SCOPUS ID : 84978862983
  • Web of Science ID : WOS:000384574400036

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