Aryl diazonium chemistry generates a covalently attached thin film on various materials. This chemistry has diverse applications owing to the stability, ease of functionalization, and versatility of the film. However, the uncontrolled growth into a polyaryl film has limited the controllability of the film's beneficial properties. In this study, we developed a multistep grafting protocol to densify the film while maintaining a thickness on the order of nanometers. This simple protocol enabled the full passivation of a nitrophenyl polyaryl film, completely eliminating the electrochemical reactions at the surface. We then applied this protocol to the grafting of phenylphosphorylcholine films, with which the densification significantly enhanced the antifouling property of the film. Together with its potential to precisely control the density of functionalized surfaces, we believe this grafting procedure will have applications in the development of bioelectrical interfaces.