Butsurin Jinnai

J-GLOBAL         Last updated: Apr 2, 2019 at 09:08
 
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Butsurin Jinnai

Published Papers

 
Yu Takahashi, Yutaro Takeuchi, Chaoliang Zhang, Butsurin Jinnai, Shunsuke Fukami, and Hideo Ohno
Applied Physics Letters   114(1) 012410   Jan 2019   [Refereed]
Butsurin Jinnai, Hideo Sato, Shunsuke Fukami, and Hideo Ohno
Applied Physics Letters   113(21) 212403   Nov 2018   [Refereed]
Watanabe K., Jinnai B., Fukami S., Sato H., Ohno H.
NATURE COMMUNICATIONS   9    Feb 2018   [Refereed]
Jinnai Butsurin, Zhang Chaoliang, Kurenkov Aleksandr, Bersweiler Mathias, Sato Hideo, Fukami Shunsuke, Ohno Hideo
APPLIED PHYSICS LETTERS   111(10)    Sep 2017   [Refereed]
Matsunaga Noriaki, Okumura Hirokatsu, Jinnai Butsurin, Samukawa Seiji
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   29(4)    Jul 2011   [Refereed]

Patents

 
特許US9899227 : System, method and apparatus for ion milling in a plasma etch chamber
Joydeep Guha, Butsurin Jinnai, Jun Hee Han, and Aaron Eppler
特開US20130270227 A1 : Layer-layer etch of non volatile materials
Joydeep Guha, Jeffrey Marks, and Butsurin Jinnai
特許US8784676 : Waferless Auto Conditioning
Joydeep Guha, Sanket Sant, and Butsurin Jinnai