2011年4月
Development of Novel Resist Materials for Micro-lithographic Patterning
JOURNAL OF SYNTHETIC ORGANIC CHEMISTRY JAPAN
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- 巻
- 69
- 号
- 4
- 開始ページ
- 403
- 終了ページ
- 412
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- 出版者・発行元
- SOC SYNTHETIC ORGANIC CHEM JPN
We have recently developed novel resist materials for micro-lithographic patterning. One is a hydroxystyrene derivative, which is a key compound for KrF excimer laser resists. We found that microwave-assisted decarboxylation of hydroxycinnamic acids smoothly proceeded under the presence of a catalytic amount of amine base, to afford hydroxystyrene derivatives in good yield.
The other is positive and negative-tone molecular resists utilizing the unique character of a furan ring. The synthesized compounds showed relatively high glass transition temperature and readily formed uniform amorphous films on a silicon wafer. The sensitivity as an EB resist of both positive and negative-tone resists was below 10 mu C/cm(2) and line and space patterns of 200 nm could be fabricated. The promising feature of the positive-tone resist is that no outgassed products from base matrixes are theoretically produced under the exposure and post-exposure bake procedure.
The other is positive and negative-tone molecular resists utilizing the unique character of a furan ring. The synthesized compounds showed relatively high glass transition temperature and readily formed uniform amorphous films on a silicon wafer. The sensitivity as an EB resist of both positive and negative-tone resists was below 10 mu C/cm(2) and line and space patterns of 200 nm could be fabricated. The promising feature of the positive-tone resist is that no outgassed products from base matrixes are theoretically produced under the exposure and post-exposure bake procedure.
- リンク情報
- ID情報
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- ISSN : 0037-9980
- Web of Science ID : WOS:000289590300006