論文

査読有り
2014年

Rheology printing for metal-oxide patterns and devices

JOURNAL OF MATERIALS CHEMISTRY C
  • Toshihiko Kaneda
  • ,
  • Daisuke Hirose
  • ,
  • Takaaki Miyasako
  • ,
  • Phan Trong Tue
  • ,
  • Yoshitaka Murakami
  • ,
  • Shinji Kohara
  • ,
  • Jinwang Li
  • ,
  • Tadaoki Mitani
  • ,
  • Eisuke Tokumitsu
  • ,
  • Tatsuya Shimoda

2
1
開始ページ
40
終了ページ
49
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1039/c3tc31842g
出版者・発行元
ROYAL SOC CHEMISTRY

Technologies of device printing have been widely explored, but existing printing techniques still cannot produce well-defined patterns required by fine electronic devices. Here, a new printing method is proposed and the printing of metal-oxide patterns with well-defined shapes was demonstrated. Excellent thin-film transistors with channel lengths around 500 nm were completely printed by this method in an air atmosphere. This printing utilizes a viscoelastic transformation of the precursor gel when imprinted; it softens at a certain temperature during thermal-imprinting so that the gel can be rheologically imprinted. The imprinted pattern shows very small shrinkage during post-annealing, thereby achieving a high shape fidelity to the mould; this results from metal-oxide condensation at imprinting. The viscoelastic transformation and metal-oxide condensation at imprinting constitute the basis for this printing method, which is closely related to the cluster structure in the precursor gel. This method has worked for patterns down to several tens of nanometers.

リンク情報
DOI
https://doi.org/10.1039/c3tc31842g
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000327849500003&DestApp=WOS_CPL
ID情報
  • DOI : 10.1039/c3tc31842g
  • ISSN : 2050-7526
  • eISSN : 2050-7534
  • Web of Science ID : WOS:000327849500003

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