2021年12月20日
MEMS post-processed self-assembled electret for vibratory energy harvesters
Applied Physics Letters
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- 巻
- 119
- 号
- 25
- 開始ページ
- 254102
- 終了ページ
- 254102
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/5.0072596
- 出版者・発行元
- AIP Publishing
Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key technology for converting the mechanical energy of environmental vibrations into electricity. Unfortunately, conventional electret charging methods generally rely on high-voltage and high-temperature processes that present limitations to MEMS design and production. Here, we show a MEMS post-processed self-assembled electret (SAE) that enables the integration of electrets with MEMS vibratory devices via evaporation as a post-MEMS process. Owing to the spontaneous orientation of polar molecules, the surface potential of the SAE can build up at room temperature in a microscopic region without charging processes, which enhances the design and fabrication flexibility of electret-based MEMS energy harvesters. We develop a MEMS vibratory device followed by post-processing the SAE and confirm induced electrical currents caused by the electrical field of the SAE at the vibrational input. This SAE-based MEMS technology is a promising design guideline for highly integrated single-chip MEMS vibratory energy harvesters. Published under an exclusive license by AIP Publishing.
- リンク情報
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- DOI
- https://doi.org/10.1063/5.0072596
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000755178100009&DestApp=WOS_CPL
- 共同研究・競争的資金等の研究課題
- セキュアIoTデバイスに向けたMEMS自壊設計技術の開発
- 共同研究・競争的資金等の研究課題
- 多層エレクトレット集積型CMOS-MEMS振動発電素子の創製
- URL
- https://aip.scitation.org/doi/pdf/10.1063/5.0072596
- ID情報
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- DOI : 10.1063/5.0072596
- ISSN : 0003-6951
- eISSN : 1077-3118
- Web of Science ID : WOS:000755178100009