論文

2021年11月15日

Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB

Sensors
  • Joerg Froemel
  • ,
  • Gildas Diguet
  • ,
  • Masanori Muroyama

21
22
開始ページ
7578
終了ページ
7578
記述言語
掲載種別
研究論文(学術雑誌)
DOI
10.3390/s21227578
出版者・発行元
MDPI AG

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.

リンク情報
DOI
https://doi.org/10.3390/s21227578
URL
https://www.mdpi.com/1424-8220/21/22/7578/pdf
ID情報
  • DOI : 10.3390/s21227578
  • eISSN : 1424-8220

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