論文

査読有り
2009年

Fabrication of multi-layered absorption structure for high quantum efficiency photon detectors

LOW TEMPERATURE DETECTORS LTD 13
  • Go Fujii
  • ,
  • Daiji Fukuda
  • ,
  • Takayuki Numata
  • ,
  • Akio Yoshizawa
  • ,
  • Hidemi Tsuchida
  • ,
  • Hidetoshi Fujino
  • ,
  • Hiroyuki Ishii
  • ,
  • Taro Itatani
  • ,
  • Shuichiro Inoue
  • ,
  • Tatsuya Zama

1185
開始ページ
719
終了ページ
+
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1063/1.3292442
出版者・発行元
AMER INST PHYSICS

We report on some efforts to improve a quantum efficiency of titanium-based optical superconducting transition edge sensors using the multi-layered absorption structure for maximizing photon absorption in the Ti layer. Using complex refractive index values of each film measured by a Spectroscopic Ellipsometry, we designed and optimized by a simulation code. An absorption measurement of fabricated structure was in good agreement with the design and was higher than 99 % at optimized wavelength of 1550 nm.

リンク情報
DOI
https://doi.org/10.1063/1.3292442
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000281588500161&DestApp=WOS_CPL
ID情報
  • DOI : 10.1063/1.3292442
  • ISSN : 0094-243X
  • Web of Science ID : WOS:000281588500161

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