2009年
Fabrication of multi-layered absorption structure for high quantum efficiency photon detectors
LOW TEMPERATURE DETECTORS LTD 13
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- 巻
- 1185
- 号
- 開始ページ
- 719
- 終了ページ
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- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1063/1.3292442
- 出版者・発行元
- AMER INST PHYSICS
We report on some efforts to improve a quantum efficiency of titanium-based optical superconducting transition edge sensors using the multi-layered absorption structure for maximizing photon absorption in the Ti layer. Using complex refractive index values of each film measured by a Spectroscopic Ellipsometry, we designed and optimized by a simulation code. An absorption measurement of fabricated structure was in good agreement with the design and was higher than 99 % at optimized wavelength of 1550 nm.
- リンク情報
- ID情報
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- DOI : 10.1063/1.3292442
- ISSN : 0094-243X
- Web of Science ID : WOS:000281588500161