Tetsuya Goto

J-GLOBAL         Last updated: Sep 9, 2019 at 16:25
 
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Name
Tetsuya Goto
Nickname
後藤哲也
Affiliation
Tohoku University
Section
New Industry Creation Hatchery CenterIndustry Creation Section
Research funding number
00359556

Research Interests

 
 

Research Areas

 
 

Academic & Professional Experience

 
Apr 2007
 - 
Today
Associate Professor, New Industry Creation Hatchery Center, Tohoku University
 
Apr 2002
 - 
Mar 2007
Assistant Professor, New Industry Creation Hatchery Center, Tohoku University
 

Awards & Honors

 
May 2013
"Electrical Properties of Amorphous InGaZnO Thin-Film Transistors Prepared by Magnetron Sputtering Using Kr and Xe Instead of Ar", SID2013 Distinguished Paper Award,, Society for Information Display,
Winner: Tetsuya Goto, Shigetoshi Sugawa, and Tadahiro Ohmi
 

Published Papers

 
T. Goto, S. Kobayashi, Y. Yabuta, and S. Sugawa
ECS Journal of Solid State Science and Technology   8(8) N113-N118   Jul 2019   [Refereed]
S. Ichino, T. Mawaki, A. Teramoto, R. Kuroda, H. Park, S. Wakashima, T. Goto, T. Suwa and S. Sugawa
Jpn. J. Appl. Phys.   57 04FF08-04FF08-6   2018   [Refereed]
Tetsuya Goto, Kei-ichiro Sato, Yuki Yabuta, Shigetoshi Sugawa and Shiro Hara
IEEE Journal of Electron Devices Society   6 512-517   2018   [Refereed]
Tetsuya Goto, Kaori Saito, Fuminobu Imaizumi, Makoto Hatanaka, Masami Takimoto, Michinobu Mizumura, Jun Gotoh, Hiroshi Ikenoue, and Shigetoshi Sugawa
IEEE Trans. Electron Devices   65(8) 3250-3256   2018   [Refereed]
(1) Tetsuya Goto, Michito Miyahara, Masaru Sasaki, and Shigetoshi Sugawa
Journal of Vacuum Science & Technology A   36 061404-061404-6   2018   [Refereed]
Y. Shiba, A. Teramoto, T. Goto, Y. Kishi, Y. Shirai, and S. Sugawa
J. Vac. Sci. Technol. A   35 021405-021405-6   2017   [Refereed]
T. Goto, F. Imaizumi, and S. Sugawa
IEEE Electron Device Letters   38 345-348   2017   [Refereed]
Yasutaka MAEDA, Shun-ichiro OHMI, Tetsuya GOTO, and Tadahiro OHMI
IEICE TRANSACTIONS on Electronics   E100-C(5) 463-467   2017   [Refereed]
Tetsuya Goto, Rihito Kuroda, Naoya Akagawa, Tomoyuki Suwa, Akinobu Teramoto, Xiang Li, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Yutaka Kamata, Yuki Kumagai, and Katsuhiko Shibusawa
ECS Journal of Solid State Science and Technology   5(2) 67-72   2016   [Refereed]
マイクロレンズ局所レーザーアニールによる薄膜トランジスタの試作
杉本 重人, 瀬名波 匡, 滝本 政美, 畑中 誠, 水村 通伸, 梶山 康一, 今泉 文伸, 後藤 哲也, 城戸 淳二
レーザー学会誌   44(3) 193-197   2016   [Refereed]

Conference Activities & Talks

 
Selective Laser Annealing Technology for LTPS Thin Film Transistors Fabrications [Invited]
Tetsuya Goto
2019 International Conference on Solid State Devices and Materials   3 Sep 2019   
Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions [Invited]
Tetsuya Goto
Society for Information Display 2014 International Symposium   23 May 2014