MISC

2011年9月25日

5-4 自立金属ナノ薄膜のき裂進展におけるサイズ効果(セッション5:OS1-2 マルチスケール・シミュレーションとナノ計測)

マイクロ・ナノ工学シンポジウム
  • 平方 寛之
  • ,
  • 近藤 俊之
  • ,
  • 西嶋 修
  • ,
  • 米津 明生
  • ,
  • 箕島 弘二

2011
3
開始ページ
55
終了ページ
56
記述言語
日本語
掲載種別
出版者・発行元
一般社団法人日本機械学会

We conducted crack propagation experiments on freestanding copper films with thicknesses ranging from about 800 to 100nm deposited by electron beam evaporation to clarify the size effect on fracture toughness in the nano-scale. It was found that initially, the crack propagated stably under loading, and then the crack propagation rate rapidly increased, resulting in unstable fracture. The fracture toughness K_C was estimated on the basis of the R-curve concept, showing a clear size effect where thinner films have smaller fracture toughness. The fracture surface suggested that the crack underwent large plastic deformation in the thicker 800-nm and 500-nm films, whereas it propagated with highly localized plastic deformation in the thinner 100-nm film. This size effect in fracture toughness will be related to a transition in deformation and fracture morphology near the crack tip.

リンク情報
CiNii Articles
http://ci.nii.ac.jp/naid/110009664136
CiNii Books
http://ci.nii.ac.jp/ncid/AA12456946
ID情報
  • CiNii Articles ID : 110009664136
  • CiNii Books ID : AA12456946

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